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Proceedings Paper

Mechanical properties of fullerite and diamondlike carbon films using surface acoustic waves and nanoindentation
Author(s): Asta Richter; Ronald Ries
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Paper Abstract

C60 and amorphous diamond-like carbon (DLC) films have been grown by thermal evaporation and laser ablation techniques at different substrate temperatures and on various substrates. The elastic modulus and the hardness of the films have been investigated by surface acoustic waves and nanoindentation. Both methods are completely new and designed for investigations of very thin films. For homogeneous C60 films the Young's modulus was found to be 14 GPa and the Poisson's ratio of 0.2. The measured nanohardness of 167 MPa corresponds with the microhardness value of 130 MPa. There is a correlation between deposition techniques and hardness as well as Young's modulus for DLC films.

Paper Details

Date Published: 8 April 1999
PDF: 8 pages
Proc. SPIE 3725, International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology, (8 April 1999); doi: 10.1117/12.344714
Show Author Affiliations
Asta Richter, Univ. of Applied Sciences Wildau (Germany)
Ronald Ries, Univ. of Applied Sciences Wildau (Germany)


Published in SPIE Proceedings Vol. 3725:
International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology
Antoni Rogalski; Jaroslaw Rutkowski, Editor(s)

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