Share Email Print
cover

Proceedings Paper

Polycrystalline thin-film transistors on plastic substrates
Author(s): Paul G. Carey; Patrick M. Smith; Steven D. Theiss; Paul Wickboldt; Thomas W. Sigmon
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Flat panel displays made on plastic substrates are envisioned for use in certain commercial and military systems because they are more rugged and lightweight than displays made on glass substrates. High information content can be attained for such displays using an active matrix array of thin film transistors (TFTs) for the pixels and high current TFTs for the drivers. In this work the fabrication of high performance polysilicon TFTs on flexible plastic substrates is presented along with corresponding electrical characteristics. Plastic substrates pose severe temperature constraints on the fabrication process. To overcome electrical characteristics. Plastic substrates pose sever temperature constraints on the fabrication process. To overcome these constraints, our group at LLNL has used low temperature silicon, oxide, and aluminum thin film deposition steps and pulsed excimer laser processing to perform the TFT channel crystallization and the source/drain doping. Sheet resistance values below 1k(Omega) /$DAL are obtained using our laser doping technique for 900 angstrom thick polysilicon films. Our n-channel polysilicon TFT electrical performance on plastic shows mobilities up to 50 cm2/V-sec and ON current to OFF current ratios of up to 1 X 106 for gate voltages from -1 to +35 V.

Paper Details

Date Published: 12 April 1999
PDF: 7 pages
Proc. SPIE 3636, Flat Panel Display Technology and Display Metrology, (12 April 1999); doi: 10.1117/12.344632
Show Author Affiliations
Paul G. Carey, Lawrence Livermore National Lab. (United States)
Patrick M. Smith, Lawrence Livermore National Lab. (United States)
Steven D. Theiss, Lawrence Livermore National Lab. (United States)
Paul Wickboldt, Lawrence Livermore National Lab. (United States)
Thomas W. Sigmon, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 3636:
Flat Panel Display Technology and Display Metrology
Bruce Gnade; Edward F. Kelley, Editor(s)

© SPIE. Terms of Use
Back to Top