Share Email Print
cover

Proceedings Paper

ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate
Author(s): Roland Thielsch; Joerg Heber; Angela Duparre; Norbert Kaiser; Klaus R. Mann; Eric Eva
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

CaF2 has received increasing attention as a promising substrate for coatings in the VUV range. Optimization of the optical properties of these optical components requires the study of basic characteristics of the coated and uncoated CaF2 substrates such as surface roughness, optical performance, absorption and scatter losses, and laser induced damage threshold. The investigations have revealed the influence of different substrate polishing grades on the quality of AR-193nm -and HR-193nm/0 degrees coated samples. LIDT values at the ArF-excimer laser wavelength were measured as high as 5.6 J/cm2 and 4.6 J/cm2 for the best AR- and HR-coated samples, respectively.

Paper Details

Date Published: 7 April 1999
PDF: 8 pages
Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); doi: 10.1117/12.344385
Show Author Affiliations
Roland Thielsch, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Joerg Heber, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Klaus R. Mann, Laser-Lab. Goettingen e.V. (Germany)
Eric Eva, Laser-Lab. Goettingen e.V. (Germany)


Published in SPIE Proceedings Vol. 3578:
Laser-Induced Damage in Optical Materials: 1998
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

© SPIE. Terms of Use
Back to Top