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Proceedings Paper

Measurement of spatial coherence of KrF excimer laser
Author(s): Jiansheng Liu; Jingru Liu; Yanming Wei
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Paper Abstract

A kind of reversal shear interferometer has been designed to measure the temporal change of spatial coherence of KrF excimer laser with an unstable resonator. By this method, we can obtain the degree of spatial coherence from a single measurement. At different shear distance, using slit and photodetector we have observed the stepwise increase of the degree of spatial coherence at intervals equal to the transit time of resonator. Moreover, ray matrix has been used to analyze the propagation of partial coherent light and the coherence widths of successive passes are calculated.

Paper Details

Date Published: 7 August 1998
PDF: 7 pages
Proc. SPIE 3549, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II, (7 August 1998); doi: 10.1117/12.344118
Show Author Affiliations
Jiansheng Liu, Northwest Institute of Nuclear Technology (China)
Jingru Liu, Northwest Institute of Nuclear Technology (China)
Yanming Wei, Northwest Institute of Nuclear Technology (China)


Published in SPIE Proceedings Vol. 3549:
High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II
Sui-Sheng Mei; Keith A. Truesdell, Editor(s)

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