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Proceedings Paper

Fabrication of hybrid sol-gel glass diffractive elements
Author(s): Juha T. Rantala; Pekka Ayras; Raviv Levy; Michael R. Descour; Seppo Honkanen; Nasser Peyghambarian
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Paper Abstract

Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrate that also have a significant role in the component assembly. The synthesized material has a negative tone property under UV-radiation and they can be patterned by a conventional UV- lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

Paper Details

Date Published: 26 March 1999
PDF: 7 pages
Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); doi: 10.1117/12.343732
Show Author Affiliations
Juha T. Rantala, VTT Electronics (Finland)
Pekka Ayras, Optical Sciences Ctr./Univ. of Arizona (United States)
Raviv Levy, Optical Sciences Ctr./Univ. of Arizona (United States)
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)
Seppo Honkanen, Optical Sciences Ctr./Univ. of Arizona (United States)
Nasser Peyghambarian, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 3620:
Integrated Optics Devices III
Giancarlo C. Righini; S. Iraj Najafi, Editor(s)

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