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Proceedings Paper

Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing
Author(s): Shi De Cheng; Chan Hin Kam; Yan Zhou; Yee Loy Lam; Yuen Chuen Chan; Woon Siong Gan
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Paper Abstract

In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb0.5Ta0.5O3 on the silica-on silicon substrate. The solution is prepared by mixing LiOC2H5, Nb(OC2H5)5 and Ta(OC2H5)5 and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700 degrees Celsius. Our X-ray diffraction study show that the films are amorphous when annealed at 400 degrees Celsius and are crystallized over 500 degrees Celsius. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.

Paper Details

Date Published: 26 March 1999
PDF: 6 pages
Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); doi: 10.1117/12.343731
Show Author Affiliations
Shi De Cheng, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Woon Siong Gan, Acoustical Services Singapore Pte. Ltd. (Singapore)


Published in SPIE Proceedings Vol. 3620:
Integrated Optics Devices III
Giancarlo C. Righini; S. Iraj Najafi, Editor(s)

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