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Proceedings Paper

Transparent conductive sol-gel thin films for photonic applications
Author(s): Terho K. Kololuoma; Juha T. Rantala; Jouko Vaehaekangas; Risto S. Laitinen
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Paper Abstract

Antimony doped tin dioxide (SnO2:Sb) thin films are fabricated by a new simplified sol-gel process. Films are prepared from an alcoholic solution of SnCl4(DOT)4H2O doped with SbCl3. Films are deposited by the spin coating process on sodalime glass, borosilicate glass, silicon wafers and ceramic alumina substrates. The chemical reactions during the heat treatment are monitored by DSC and TG. The chemical composition of the coatings are determined by scanning electron microscopy (SEM). Sheet resistance, Rs, is measured using a linear four-probe technique. Optical properties of the films are also determined. The resistivity of the thin films are presented as a function of the antimony doping level. The smallest sheet resistance of 200 (Omega) /$DAL is found for a 250 nm thick coating on a borosilicate substrate. It is observed that the sheet resistance does not decrease linearly with increasing film thickness. Fabrication possibilities of these materials for the integrated optics based sensors including patterning methods are discussed.

Paper Details

Date Published: 26 March 1999
PDF: 9 pages
Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); doi: 10.1117/12.343723
Show Author Affiliations
Terho K. Kololuoma, VTT Electronics and Univ. of Oulu (Finland)
Juha T. Rantala, VTT Electronics (Finland)
Jouko Vaehaekangas, VTT Electronics (Finland)
Risto S. Laitinen, Univ. of Oulu (Finland)

Published in SPIE Proceedings Vol. 3620:
Integrated Optics Devices III
Giancarlo C. Righini; S. Iraj Najafi, Editor(s)

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