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Proceedings Paper

BeamM2AP: real-time focus, alignment, and M2 measurement of tightly focussed laser beams
Author(s): Andrew D. MacGregor; Steven E. Garvey
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Paper Abstract

This paper describes the design and performance of a compact new multi-plane scanning slit Beam Profiler. It allows simultaneous real-time measurement of M2 beam quality, focus position, beam-waist diameter and axial alignment, solving problems in the active adjustment and verification of tightly focused laser beams. The DataRay BeamM2APTM measures preset pass/fail criteria with sub-micron accuracy at greater than 5 Hz update rate. It is suited to the development, QA and production of precision focused laser assemblies for applications such as disk/wafer characterization, laser printing, etc.

Paper Details

Date Published: 29 March 1999
PDF: 5 pages
Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); doi: 10.1117/12.343709
Show Author Affiliations
Andrew D. MacGregor, Photonic Solutions (United States)
Steven E. Garvey, DataRay Inc. (United States)

Published in SPIE Proceedings Vol. 3619:
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
John C. Stover, Editor(s)

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