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Proceedings Paper

Converting SiO2 into crystalline Si for Si-based optoelectronics
Author(s): Yin-Sheng Tang; S. J. Cai; Kang Lung Wang
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Paper Abstract

This paper reports a low cost method of converting SiO2 or silica based glass into crystalline silicon by simple thermal annealing of Ti/Al coated SiO2 or silica glass slides. The studies were performed using Raman scattering and x-ray diffraction. The results suggest that it is possible to extract reasonably good quality crystalline silicon from SiO2 based substrates. This technique may have a wide range of applications in Si-based optoelectronics and other industry.

Paper Details

Date Published: 19 March 1999
PDF: 5 pages
Proc. SPIE 3630, Silicon-based Optoelectronics, (19 March 1999); doi: 10.1117/12.342792
Show Author Affiliations
Yin-Sheng Tang, Univ. of California/Los Angeles (United States)
S. J. Cai, Univ. of California/Los Angeles (United States)
Kang Lung Wang, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 3630:
Silicon-based Optoelectronics
Derek C. Houghton; Eugene A. Fitzgerald, Editor(s)

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