Share Email Print
cover

Proceedings Paper

Femtosecond laser-pulse nanolithography using an STM tip
Author(s): Yurii E. Lozovik; D. V. Lisin; Arkadi I. Ivanov; V. O. Kompanets; Yu. A. Matveets; Sergey V. Chekalin; S. P. Merkulova
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The new nanolithography technique realized experimentally using the local field of femtosecond laser pulses enhanced in nanoscale region due to lighting rod effect and to the excitation of local resonances in STM tip--substrate system. Surface topography analysis in STM mode demonstrates the controlled surface modification in a suitable regime of intensity parameters and femtosecond laser pulses focusing in the STM tip region.

Paper Details

Date Published: 15 March 1999
PDF: 8 pages
Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); doi: 10.1117/12.342383
Show Author Affiliations
Yurii E. Lozovik, Institute of Spectroscopy (Russia)
D. V. Lisin, Institute of Spectroscopy (Russia)
Arkadi I. Ivanov, Institute of Spectroscopy (Russia)
V. O. Kompanets, Institute of Spectroscopy (Russia)
Yu. A. Matveets, Institute of Spectroscopy (Russia)
Sergey V. Chekalin, Institute of Spectroscopy (Russia)
S. P. Merkulova, Institute of Spectroscopy (Russia)


Published in SPIE Proceedings Vol. 3734:
ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures

© SPIE. Terms of Use
Back to Top