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Proceedings Paper

Emission of particles by solid-phase laser-induced destruction of silicon surface
Author(s): Alexander F. Banishev; Vladimir S. Golubev; Alexei Yu. Kremnev
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Paper Abstract

This paper presents the results of investigation into the process of silicon surface solid-phase destruction under YAG:Nd laser pulses. The glow was registrated that was due to emission of the heated particles from the sample surface, which can be caused by microexplosions and microcracking of the surface owing to great thermoelastic stresses in the interaction area.

Paper Details

Date Published: 15 March 1999
PDF: 4 pages
Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); doi: 10.1117/12.342360
Show Author Affiliations
Alexander F. Banishev, NICTL--Laser Research Ctr. (Russia)
Vladimir S. Golubev, NICTL--Laser Research Ctr. (Russia)
Alexei Yu. Kremnev, NICTL--Laser Research Ctr. (Russia)


Published in SPIE Proceedings Vol. 3734:
ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures
Konstantin N. Drabovich; V. I. Emelyanova; Vladimir A. Makarov, Editor(s)

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