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Proceedings Paper

True temperature measurements on microscopic semiconductor targets
Author(s): Grant C. Albright; James A. Stump; John D. McDonald; Herbert Kaplan
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Paper Abstract

Thermal imaging of microscopic targets has become a critical need in the manufacturing of semiconductors and other electronic devices as thermal budgets become ever more demanding and devices become more compact and powerful. This paper describes the third generation of thermal microimagers, representing the newest advances in a twenty-year evolution of instruments having the unique capability of spatial emissivity correction for 'true' surface temperature measurement. The detection and identification of design and process defects and the management of device thermal budgets are described. The achievement of a measurement spatial resolution of better than 3 micrometers, previously unattainable, is also described.

Paper Details

Date Published: 19 March 1999
PDF: 6 pages
Proc. SPIE 3700, Thermosense XXI, (19 March 1999); doi: 10.1117/12.342291
Show Author Affiliations
Grant C. Albright, Quantum Focus Instruments Corp. (United States)
James A. Stump, Quantum Focus Instruments Corp. (United States)
John D. McDonald, Quantum Focus Instruments Corp. (United States)
Herbert Kaplan, Honeyhill Technical Co. (United States)

Published in SPIE Proceedings Vol. 3700:
Thermosense XXI
Dennis H. LeMieux; John R. Snell, Editor(s)

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