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Proceedings Paper

Atom projector: atom manipulation by laser
Author(s): Nikolay M. Sovetov; Anatoly V. Nikonov; Dmitry A. Grigoriev; Andrey V. Khobotov; Victor A. Moscovsky; Elena V. Naumova
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Paper Abstract

The problems of neutral atom beam formation and its application to the microelectronic manufacturing are considered. The plant using the focused neutral atom beam is presented. This high-vacuum plant is designed for complex CIP's processing. The scheme of this plant is given. It is divided into the following sections: atom generation, beam preparing, its structuring, compression, and surface treatment. The preparing section is described in detail. The beam is controlled by laser radiation resonant to basic transition in the atom absorption spectrum. The plant forms precisely structured low-temperature atom beams and controls atom density distribution in flow by rather simple projective methods. It allows discussing the possibility of the new, effective and high-automated manufacturing and analysis of micro-object surfaces. Resolution of the suggested method of treatment is proved to be limited only by characteristics of the equipment used. Calculation shows that at modern level of laser technique the spatial resolution of such a process can reach about 10 nm. The resolution of surface analysis is evaluated to be about 1 nm. Probable applications of the presented new technological process for integrated manufacturing, analysis and in-line reconstruction of the IC of super high integration by methods of liquid-free in-situ processing are considered.

Paper Details

Date Published: 4 March 1999
PDF: 6 pages
Proc. SPIE 3726, Saratov Fall Meeting '98: Light Scattering Technologies for Mechanics, Biomedicine, and Material Science, (4 March 1999); doi: 10.1117/12.341378
Show Author Affiliations
Nikolay M. Sovetov, Saratov State Technical Univ. (Russia)
Anatoly V. Nikonov, Saratov State Technical Univ. (Russia)
Dmitry A. Grigoriev, Saratov State Technical Univ. (Russia)
Andrey V. Khobotov, Saratov State Technical Univ. (Russia)
Victor A. Moscovsky, Saratov State Technical Univ. (Russia)
Elena V. Naumova, Saratov State Technical Univ. (Russia)

Published in SPIE Proceedings Vol. 3726:
Saratov Fall Meeting '98: Light Scattering Technologies for Mechanics, Biomedicine, and Material Science
Valery V. Tuchin; Vladimir P. Ryabukho; Dmitry A. Zimnyakov, Editor(s)

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