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Proceedings Paper

Microstereolithography: a new process to build complex 3D objects
Author(s): Laurence Beluze; Arnaud Bertsch; Philippe Renaud
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Paper Abstract

In this paper, a new microstereolithography apparatus is described. It is an integral process in which a complete layer can be made in one exposure only, in contrast to vector-by-vector processes which are based on the vectorial tracing of each layer. As for most microstereolithography processes, complex objects can be realized by superimposing layers, each layer being obtained by a light-induced polymerization of a liquid resin. The vertical and transverse resolution of the process we are developing have been measured. Complex in shape objects have been realized: small 3D polymer components have been built such as turbines, microsprings, or micropipes. They are compared of a large number of layers with a resolution better than 5 micrometers in the 3 directions of space. Some of these objects serve to demonstrate that complex in shape 3D objects can be manufactured with this technology. Sample structures which can be used in microfluidics, microrobotics or in the biomedical field are presented.

Paper Details

Date Published: 10 March 1999
PDF: 10 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341277
Show Author Affiliations
Laurence Beluze, Swiss Federal Institute of Technology (Switzerland)
Arnaud Bertsch, Swiss Federal Institute of Technology (Switzerland)
Philippe Renaud, Swiss Federal Institute of Technology (Switzerland)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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