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Proceedings Paper

Multimode frequency analysis for the dynamic characterization of microstructures
Author(s): Christian Bergaud; L. Nicu; A. Martinez; P. Gerard; M. Benzohra
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Paper Abstract

A dynamic characterization of SiO2-Au composite cantilever beams and Si3N4-Au composite microbridges, has been performed to determine the effective residual stress in thin film-based microstructures. For the cantilever beams, the first three resonant frequencies were measured and compared to the theoretical ones obtained with a simple analytical model taking into account the effect of the gold layer on the shift of the resonant frequencies. A very good agreement is obtained between theoretical and experimental values showing the validity of the approach. Concerning the composite microbridges, the Rayleigh-Ritz method has been applied to obtain the relationship between the resonant frequencies and the effective residual stress. Using this method, the effective residual stress within the Si3N4-Au composite microbridges has been determined, (sigma) eff equals 610 +/- 40 MPa.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341270
Show Author Affiliations
Christian Bergaud, LAAS-CNRS (France)
L. Nicu, LAAS-CNRS (France)
A. Martinez, LAAS-CNRS (France)
P. Gerard, LAAS-CNRS and LEMI/Univ. de Rouen (France)
M. Benzohra, LAAS-CNRS and LEMI/Univ. de Rouen (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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