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Proceedings Paper

Infrastructure for microsystem production
Author(s): Henne van Heeren; Stefan Sanchez; Job Elders; Rene G. Heideman
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Paper Abstract

Manufacturing of micro-systems differs from IC manufacturing because the market requires a diversity of products and lower volumes per product. In addition, a diversity of micro-technologies has been developed, including non-IC compatible processes and potentially IC compatible processes. An infrastructure for the production of micro- system devices is lacking. On one side the technology for MST is available at the universities and small university related companies. On the other side there are several small and medium enterprises and bigger companies wanting to implement MST devices in their products, but unwilling to be dependent on universities. Philips Electronics in the Netherlands and Twente MicroProducts realized this problem and have started a project to fill this gap. At this moment the basic of the infrastructure is available: OnStream BV, Eindhoven, The Netherlands, opened its waferfab and assembly facilities for the production of MST devices. Twente MicroProducts will take care of the design of the products and of the small-scale production. Integration of quality systems for maintenance, yield, statistical process control and production in a Manufacturing Execution System offers direct access for all people involved to all the relevant information. It also ensures quality of the products made. The available capabilities of the infrastructure in the current status are compared to the market needs. In this article, a description of a seamless Micro-System Engineering Foundry is given. A seamless organization is capable of helping the customer from design to production. Several examples are given.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341268
Show Author Affiliations
Henne van Heeren, OnStream BV (Netherlands)
Stefan Sanchez, OnStream BV (Netherlands)
Job Elders, Twente MicroProducts (Netherlands)
Rene G. Heideman, Twente MicroProducts (Netherlands)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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