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Proceedings Paper

Conventional micromachining for microassembly applications
Author(s): Ramona Eberhardt; A. Gebhardt; Torsten Scheller
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Paper Abstract

There is a growing demand for improvements in microassembly technology, especially in the area of high precision positioning. By observing the specific requirements of the micro world a spectrum of possibilities for the passive positioning supported by devices produced by conventional micromachining have been developed. By the experimental examination of different optical subassemblies an evaluation of the potentials of utilization of the passive positioning was carried out.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341261
Show Author Affiliations
Ramona Eberhardt, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
A. Gebhardt, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Torsten Scheller, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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