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Proceedings Paper

MOEMS at LETI
Author(s): Patrick Louis Mottier; Eric Ollier; Patrick Pouteau; Karine Petroz; Sylvie Jarjayes
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Paper Abstract

We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means of microelectronics like process and machines. Different devices and demonstrators already exist at LETI such as micro-switches for optical fiber networks, vibration sensors, scanning devices for laser or are under development such as tunable Fabry-Perot interferometers. Examples and performances are presented.

Paper Details

Date Published: 10 March 1999
PDF: 11 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341258
Show Author Affiliations
Patrick Louis Mottier, CEA-LETI (France)
Eric Ollier, CEA-LETI (France)
Patrick Pouteau, CEA-LETI (France)
Karine Petroz, CEA-LETI (France)
Sylvie Jarjayes, CEA-LETI (France)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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