Share Email Print
cover

Proceedings Paper

Design and realization of a penny-shaped micromotor
Author(s): Matthias Nienhaus; Wolfgang Ehrfeld; H. D. Stoelting; Frank Michel; S. Kleen; S. Hardt; Felix Schmitz; T. Stange
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

For many applications in rapid growing markets of microproducts, e.g. miniaturized hard disk drives in personal computers, mobile optical scanners, or for the market of consumer electronics, a novel, penny-shaped micromotor was developed at IMM. Designed to provide an output torque of more than 100 (mu) Nm, the permanent magnet motor shows a diameter of 12.8 mm and a height of 1.4mm. Besides the maximum torque and the ultra-flat shape, one further essential design parameter was a construction that allows an easy assembly and is suitable for mass-production. An important contribution to mass production philosophy is the intensive use of microfabrication technologies especially for both, the production of the permanent magnet rings by micro molding and micro compressing techniques and the micro coils by the way of photolithographic batch processes.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341250
Show Author Affiliations
Matthias Nienhaus, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)
H. D. Stoelting, Univ. Hannover (Germany)
Frank Michel, Institut fuer Mikrotechnik Mainz GmbH (Germany)
S. Kleen, Institut fuer Mikrotechnik Mainz GmbH (Germany)
S. Hardt, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Felix Schmitz, Institut fuer Mikrotechnik Mainz GmbH (Germany)
T. Stange, Institut fuer Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS

© SPIE. Terms of Use
Back to Top