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Proceedings Paper

Microfabrication of biofactory-on-a-chip devices using laser ablation technology
Author(s): Mark S. Talary; Julian P.H. Burt; Nadeem Hasan Rizvi; Phil T. Rumsby; Ron Pethig
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Paper Abstract

In recent years, microfabrication techniques derived from existing expertise in the microelectronics industry have been applied to the fields of biotechnology and clinical diagnostics. In this work, 'Biofactory-on-a-chip' devices are being developed to demonstrate how these microfabrication techniques can be combined with electrokinetic phenomena to manipulate, separate and characterize biological material using non-uniform electric fields. Excimer laser ablation methods have been used to fabricate these devices. Key to the successful fabrication and functioning of 'Biofactory' devices is the ability to: machine microelectrodes with micrometer feature sizes over a large area; create via-holes in insulating layers to form electrical interconnects in multilayer structures; fabricate shaped microfluidic channels; and control alignment in the device production with micron accuracy.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341248
Show Author Affiliations
Mark S. Talary, Institute of Molecular and Biomolecular Electronics (United Kingdom)
Julian P.H. Burt, Institute of Molecular and Biomolecular Electronics (United Kingdom)
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Ron Pethig, Institute of Molecular and Biomolecular Electronics (United Kingdom)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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