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Proceedings Paper

Microstereolithography using a dynamic mask generator and a noncoherent visible light source
Author(s): Serge Monneret; Virginie Loubere; Serge Corbel
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Paper Abstract

Laser stereolithography deals with the manufacture of 3D objects that are made by space-resolved laser-induced polymerization. In order to obtain 3D micro-objects, we developed a new microstereolithography apparatus based on the use of a dynamic mask generator which allows the manufacture of a complete layer by only one irradiation, the part being manufactured layer by layer. This process is compared of a broad-band visible light source, that leads to the elimination of speckle effects resulting from the conventional use of a laser beam, and of a liquid crystal display as the dynamic mask generator. A lateral resolution of 2 micrometers has been demonstrated, and some examples of high aspect ratio micro-objects are presented.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341246
Show Author Affiliations
Serge Monneret, Ecole Nationale Superieure des Industries Chimiques de Nancy (France)
Virginie Loubere, Ecole Nationale Superieure des Industries Chimiques de Nancy (France)
Serge Corbel, Ecole Nationale Superieure des Industries Chimiques de Nancy (France)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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