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Proceedings Paper

X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits
Author(s): Roland K. Kupka; Faycal Bouamrane; Marc Roulliay; Stephan Megtert
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Paper Abstract

Today's dimensionality of microtechnology enables the fabrication of precise objects, like diffraction limited x- ray transmission optics. Based on deep x-ray/LIGA technology, first results are presented concerning the fabrication and modelling of parabolic and massive-serial focalizing x-ray transmission lenses in PMMA, as opposed to standard grazing incidence reflection optics. The theoretical performance limitations of such optical systems are derived and stem from fundamental physical properties like the anomalous dispersion properties of the used materials. Parabolic x-ray transmission lenses are limited to very small numerical apertures, but behave optically like any ideal transmission lens would do. The advantages of deep x-ray LIGA technology are its favorable surface roughness and inherent precision. Unlike silicon micromachining, LIGA technique profits from a larger choice of possible materials. The importance of low-Z compounds like Lithium or Be/B is pointed out, together with necessary new techniques in the framework of LIGA, like electroplating from organic solutions.

Paper Details

Date Published: 10 March 1999
PDF: 10 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341240
Show Author Affiliations
Roland K. Kupka, LURE/Univ. de Paris-Sud (France)
Faycal Bouamrane, LURE/Univ. de Paris-Sud (France)
Marc Roulliay, LURE/Univ. de Paris-Sud (France)
Stephan Megtert, LURE/Univ. de Paris-Sud (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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