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Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys
Author(s): David M. Allen; Sue A. Impey; Remi Robin; Tom T. Chen
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Paper Abstract

Shape memory alloys are used in the manufacture of microactuators and stents. This paper discusses (1) the nature of the surface oxide layer on NiTi shape memory alloys; (2) its role in protecting the underlying base metal from chemical and electrochemical etchants; (3) how the oxide can be removed and;; (4) the necessity of rapid by- product removal from the metal-etchant interface to achieve even the etching of the underlying alloy.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341237
Show Author Affiliations
David M. Allen, Cranfield Univ. (United Kingdom)
Sue A. Impey, Cranfield Univ. (United Kingdom)
Remi Robin, Cranfield Univ. (United Kingdom)
Tom T. Chen, Cranfield Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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