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Proceedings Paper

Advanced 3D-CAD interface for micromachining with excimer lasers
Author(s): Hans Kurt Toenshoff; Ferdinand von Alvensleben; Christian Kulik
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Paper Abstract

Using CAD-CAM software tools in a production chain from the design to the NC code generation and manufacturing of workpieces is state of the art in common technologies such as milling or turning. Today these software tools are equipped with intelligent algorithms consider the characteristics of the respective production technology like e.g. the consideration of different tools to manufacture different volume sizes or the quality of special surface finishes.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341218
Show Author Affiliations
Hans Kurt Toenshoff, Laser Zentrum Hannover e.V. (Germany)
Ferdinand von Alvensleben, Laser Zentrum Hannover e.V. (Germany)
Christian Kulik, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus; Wolfgang Ehrfeld, Editor(s)

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