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Proceedings Paper

Providing technology infrastructure for MEMS
Author(s): Renato P. Ribas; D. Veychard; Jean Michel Karam; Bernard Courtois
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Paper Abstract

CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341213
Show Author Affiliations
Renato P. Ribas, CMP (France)
D. Veychard, CMP (France)
Jean Michel Karam, CMP (France)
Bernard Courtois, CMP (France)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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