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Proceedings Paper

Structured CAD methodology for integrated MEMS and IC design
Author(s): Linh Nguyen; Hee Jung Lee; Mary Ann Perez-Maher; Ying Xu
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Paper Abstract

MEMS design tools are increasingly important as micro systems find wider applications. Though established structured design methodologies are in place for VLSI design, these tools cannot be applied to MEMS design without adaptation. Several needs must be met to enable MEMS design: (1) non-linear, dynamic and multi-energy domain design and simulation; (2) expression of complex and curvilinear geometries; (3) arbitrary orientation and placement of MEMS components; and (4) comprehensive, 3D visualization and analyses.

Paper Details

Date Published: 10 March 1999
PDF: 7 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341209
Show Author Affiliations
Linh Nguyen, Tanner Research, Inc. (United States)
Hee Jung Lee, Tanner Research, Inc. (United States)
Mary Ann Perez-Maher, Tanner Research, Inc. (United States)
Ying Xu, Tanner Research, Inc. (United States)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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