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Proceedings Paper

Prospective MEMS applications at NEC
Author(s): Kenichiro Suzuki
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Paper Abstract

This paper describes several silicon micromachined devices that have been developed at NEC from the viewpoint of commercial applications. The author learned it was difficult to continually succeed in business, even if the related technology could be established. It is supposed that the market for micromachined devices will soon become saturated, leading to strong cost competition and declining profitability. On the other hand, the potential wide applications for MEMS will allow many companies to develop their own specialties in the future.

Paper Details

Date Published: 10 March 1999
PDF: 6 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341199
Show Author Affiliations
Kenichiro Suzuki, NEC Corp. (Japan)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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