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Proceedings Paper

Microwave planar lumped circuit elements on micromachined thin dielectric membranes
Author(s): Sergiu A. Iordanescu; Alexandru Mueller; Romolo Marcelli; G. Bartolucci; Ioana Petrini; Dan Vasilache; Viorel Avramescu
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Paper Abstract

This paper presents the technological processes developed in order to obtain high quality 1.5micrometers membranes on high resistivity (100) and (111) oriented silicon. To emphasize the outstanding characteristics of the membrane supported elements, coplanar meander-line, 'S'-line and square spiral inductors, as well as interdigitated capacitors were designed and manufactured both on dielectric membranes and on bulk SI GaAs substrates, and their equivalent circuit was developed, too. An improvement of the measured resonant frequencies by a factor of 1.7 to 1.8 was noticed. Equivalent circuits, able to simulate the behavior of the coplanar elements up to twice their resonance frequencies, were developed. The paper brings into relief, quantitatively, the superiority of the membrane supported microwave planar lumped elements.

Paper Details

Date Published: 10 March 1999
PDF: 9 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341192
Show Author Affiliations
Sergiu A. Iordanescu, National Institute for Research and Development in Microtechnologies (Romania)
Alexandru Mueller, National Institute for Research and Development in Microtechnologies (Romania)
Romolo Marcelli, CNR-Microwave Microsystem Technology (Italy)
G. Bartolucci, Univ. of Rome "Tor Vergata" (Italy)
Ioana Petrini, National Institute for Research and Development in Microtechnologies (Romania)
Dan Vasilache, National Institute for Research and Development in Microtechnologies (Romania)
Viorel Avramescu, National Institute for Research and Development in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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