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Proceedings Paper

Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
Author(s): Oliver Roetting; Bernd Koehler; Frank-Joachim Reuther; Hartmut Blum; Walter Bacher
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Paper Abstract

Hot embossing is an inexpensive method for the reproduction of microstructures. It has matured during the last few years from a pure laboratory method to an industrially applicable process. As an example, the technology for the production of movable metallic microstructures by aligned to embossing and reactive ion etching is presented, which has been developed at the Forschungszentrum Karlsruhe/IMT.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341173
Show Author Affiliations
Oliver Roetting, Jenoptik Mikrotechnik GmbH (Germany)
Bernd Koehler, Forschungszentrum Karlsruhe GmbH (Germany)
Frank-Joachim Reuther, Jenoptik Mikrotechnik GmbH (Germany)
Hartmut Blum, Jenoptik Mikrotechnik GmbH (Germany)
Walter Bacher, Forschungszentrum Karlsruhe GmbH (Germany)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS

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