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Proceedings Paper

Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process
Author(s): Kaihsiang Yen; Chienliu Chang; Peizen Chang; Jinghung Chiou; Jenn-Yi Chen; Hunghsuan Lin
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Paper Abstract

This work fabricates a laminated-suspension microwave switch using the conventional CMOS process. The proposed microwave switch is fully compatible with an IC foundry service, and the post-process is completed with maskless dry-etching. In addition, the switch only requires a low dc voltage of around 18 V for electrostatic traction. This novel design corresponds to the 0.6 micrometers 3-metal CMOS process. A micromachined microwave switch consists of two electrostatic parallelogram actuators, two T-type connectors and one coplanar waveguide (CPW) on p-type silicon substrate. The microstructures are suspended over silicon substrate by maskless dry-etching oxide and silicon. Without an applied voltage, the actuators do not affect the CPW, accounting for why T-type connectors of actuators do not couple to microwave propagation. With an applied voltage, dc voltage is applied to the actuators to make T-type connectors contact with the signal line of CPW. The capacitance coupling becomes significantly larger than the first one to intercept microwave propagation.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341171
Show Author Affiliations
Kaihsiang Yen, National Taiwan Univ. (Taiwan)
Chienliu Chang, National Taiwan Univ. (Taiwan)
Peizen Chang, National Taiwan Univ. (Taiwan)
Jinghung Chiou, National Taiwan Univ. (Taiwan)
Jenn-Yi Chen, National Taiwan Univ. (Taiwan)
Hunghsuan Lin, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS

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