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Proceedings Paper

Acoustic characterization of TiO2 film for humidity sensors applications
Author(s): Cinzia Caliendo; Enrico Verona
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Paper Abstract

The change in the SAW phase velocity due to the presence of a TiO2 thin film of the propagation surface of a piezoelectric substrate has been used for the determination of the elastic constant of the layers. The relative change (Delta) v/v in the SAW phase velocity v0 is expressed, using the perturbation theory, in function of the material density and of the elastic constants of the film. A comparison between the values of (Delta) v/v obtained with exact calculations, the approximate theory and the experimental values allowed us to evaluate the physical constants of TiO2 films to be used as sensitive membranes in relative humidity sensors applications.

Paper Details

Date Published: 10 March 1999
PDF: 8 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341169
Show Author Affiliations
Cinzia Caliendo, Istituto di Acustica (Italy)
Enrico Verona, Istituto di Acustica (Italy)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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