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Proceedings Paper

Development of silicon microheaters for chemoresistive gas sensors
Author(s): Sebastiano Brida; Lorenza Ferrario; Flavio Giacomozzi; Domenico Giusti; Vittorio Guarnieri; Benno Margesin; Giorgio U. Pignatel; Giovanni Soncini; Alexey N. Vasil'ev; Giovanni Verzellesi; Mario Zen
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Paper Abstract

We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

Paper Details

Date Published: 10 March 1999
PDF: 5 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341164
Show Author Affiliations
Sebastiano Brida, ITC-IRST (Italy)
Lorenza Ferrario, ITC-IRST (Italy)
Flavio Giacomozzi, ITC-IRST (Italy)
Domenico Giusti, Univ. of Trento (Italy)
Vittorio Guarnieri, ITC-IRST (Italy)
Benno Margesin, ITC-IRST (Italy)
Giorgio U. Pignatel, Univ. of Trento (Italy)
Giovanni Soncini, ITC-IRST and Univ. of Trento (Italy)
Alexey N. Vasil'ev, Kurchatov Institute (Russia)
Giovanni Verzellesi, Univ. of Trento (Italy)
Mario Zen, ITC-IRST (Italy)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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