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Proceedings Paper

Optimization of cantilever probes for atomic force microscopy
Author(s): Niels F. Pedersen
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Paper Abstract

A cantilever beam use din an Atomic Force Microscope is optimized with respect to performance. The first goal of the optimization is to maximize the first eigen frequency, the second goal is to maximize tip angle of the probe in either the static deflection mode or the first eigenmode. During the optimization we will constrain the stiffness of the probe to be constant. In the optimization, the angel is used as the objective but the maximization of the angel will also results in increased first eigen-frequency. Adding a restriction on the second eigen frequency, result in a significant change of the shape. The beam is modeled with 12 DOF beam finite elements and the optimizations are carried out with MMA.

Paper Details

Date Published: 10 March 1999
PDF: 10 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341154
Show Author Affiliations
Niels F. Pedersen, Technical Univ. of Denmark (Denmark)


Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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