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Proceedings Paper

MEMS resonator synthesis for testability
Author(s): Nilmoni Deb; Sitaraman V. Iyer; Tamal Mukherjee; Ronald D. Shawn Blanton
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Paper Abstract

We combine our MEMS synthesis and test capabilities into a synthesis-for-test environment. A microresonator design meeting a variety of specifications is synthesized. The susceptibility of this design is then measured using our MEMS contamination analyzer. The nature of each defective microresonator is determined and the deviation form nominal performance is correlated to the bounds and design constraints used in the synthesis process. Feedback from this analysis is formulated into additional design constraints for the synthesis tool with the object of minimizing the impact of spot contaminations. Re-synthesis of the same designs using these additional constraints indicates that a certain class of catastrophic and parametric faults can be reduced by 25 percent without sacrificing performance.

Paper Details

Date Published: 10 March 1999
PDF: 12 pages
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341153
Show Author Affiliations
Nilmoni Deb, Carnegie Mellon Univ. (United States)
Sitaraman V. Iyer, Carnegie Mellon Univ. (United States)
Tamal Mukherjee, Carnegie Mellon Univ. (United States)
Ronald D. Shawn Blanton, Carnegie Mellon Univ. (United States)

Published in SPIE Proceedings Vol. 3680:
Design, Test, and Microfabrication of MEMS and MOEMS
Bernard Courtois; Wolfgang Ehrfeld; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus, Editor(s)

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