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Proceedings Paper

Thin film waveguide sensors for chemical detection
Author(s): Pekka Ayras; David F. Geraghty; Seppo Honkanen; Karen M. Grace; Basil I. Swanson; Karl C. Shrouf; Xiaoguang Yang; Pekka Katila; Matti J. Leppihalme; Ari Tervonen; Nasser Peyghambarian
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Paper Abstract

A chemical sensor scheme, based on selective sensing surfaces and highly sensitive integrated optical transduction is presented. Self-assembly techniques are used to covalently attach species selective films onto the surface of silicon nitride waveguides. Exposure to targeted analytes results in selective absorption of these molecules onto the waveguide surface, causing a change in the effective refractive index of the guided modes. These relative changes in effective refractive indices of TM and TE modes are measured using Zeeman interferometry. The measurements demonstrate reversible, real time sensing of volatile organic compounds at ppm level. Improvements in the waveguide design are proposed to further increase the sensor performance.

Paper Details

Date Published: 26 February 1999
PDF: 7 pages
Proc. SPIE 3537, Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring, (26 February 1999); doi: 10.1117/12.341045
Show Author Affiliations
Pekka Ayras, Optical Sciences Ctr./Univ. of Arizona (United States)
David F. Geraghty, Optical Sciences Ctr./Univ. of Arizona (United States)
Seppo Honkanen, Optical Sciences Ctr./Univ. of Arizona (United States)
Karen M. Grace, Los Alamos National Lab. (United States)
Basil I. Swanson, Los Alamos National Lab. (United States)
Karl C. Shrouf, Los Alamos National Lab. (United States)
Xiaoguang Yang, Los Alamos National Lab. (United States)
Pekka Katila, VTT Electronics (France)
Matti J. Leppihalme, VTT Electronics (Finland)
Ari Tervonen, Nokia Research Ctr. (Finland)
Nasser Peyghambarian, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3537:
Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring
Mahmoud Fallahi; Mahmoud Fallahi; Robert J. Nordstrom; Terry R. Todd, Editor(s)

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