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Proceedings Paper

Step-height and step-transition measurements with the heterodyne differential interferometer
Author(s): D. V. Baranov; A. A. Egorov; Evgeny M. Zolotov; Konstantin K. Svidzinsky
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Paper Abstract

The express method of determination of microstep parameters (height and width), based on the comparison of the complex simulated responses with the experimental one has been elaborated. A superresolution in determination of object lateral parameters is obtained using a priori information.

Paper Details

Date Published: 25 February 1999
PDF: 4 pages
Proc. SPIE 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements, (25 February 1999); doi: 10.1117/12.340150
Show Author Affiliations
D. V. Baranov, General Physics Institute (Russia)
A. A. Egorov, General Physics Institute (Russia)
Evgeny M. Zolotov, General Physics Institute (Russia)
Konstantin K. Svidzinsky, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 3736:
ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements
Anatoli V. Andreev; Sergei N. Bagayev; Anatoliy S. Chirkin; Vladimir I. Denisov, Editor(s)

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