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Proceedings Paper

Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements
Author(s): Valery P. Kiryanov
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Paper Abstract

The state of the art of the problem for the laser- interferometer transducer resolution increase is discussed. It is noted that the element basis of transducer electronic systems, allows achievement of resolution approximately (lambda) /1024 (or 0.6nm). The problems of accuracy providing the interferometric displacement transformation are analyzed by the example of the control system creation for the precision air bearing table of the laser pattern generator with submicron resolution. The peculiarities of this task solution caused the presence of inner heat and turbulence sources are considered. Examples of the known technical methods for solution of this problem are shown.

Paper Details

Date Published: 25 February 1999
PDF: 6 pages
Proc. SPIE 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements, (25 February 1999); doi: 10.1117/12.340147
Show Author Affiliations
Valery P. Kiryanov, Technological Design Institute of Scientific Instrument Engineering (Russia)


Published in SPIE Proceedings Vol. 3736:
ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements

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