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Proceedings Paper

Recurrence interferometric data processing for a noncontact surface profile testing system
Author(s): Igor P. Gurov; Adalet N. Djabiev
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Paper Abstract

Recurrence method of interferometric data processing was developed and investigated. The method proposed is based on theory of stochastic difference equations. Recurrence filtering of measured surface profile data provides the result definition in a wide range of profile deviation with moderate requirement to a priori estimates of interferometric process parameters. There were found the accuracy estimates of real interference signal parameters in a two-wavelength interferometer with phase recovering in real time scale of data obtaining.

Paper Details

Date Published: 20 January 1999
PDF: 7 pages
Proc. SPIE 3688, 6th International Conference on Industrial Lasers and Laser Applications '98, (20 January 1999); doi: 10.1117/12.337551
Show Author Affiliations
Igor P. Gurov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Adalet N. Djabiev, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 3688:
6th International Conference on Industrial Lasers and Laser Applications '98
Vladislav Ya. Panchenko; Vladimir S. Golubev, Editor(s)

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