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Proceedings Paper

Cross-beam pulsed laser deposition of ultrathin multilayer metal films
Author(s): Andre A. Gorbunov; A. Tselev; Wolfgang Pompe
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Paper Abstract

High efficiency of material usage accompanied with reliable droplets filtering is demonstrated in the cross-beam pulsed laser deposition of nm-period metallic multilayers. The mean and maximum kinetic energies of ions in CBLD have proved to be 2-3 times lower as compared to the conventional PLD. Ballistic simulations of the resulting transition layer thickness in nm-period metallic multilayers are presented.

Paper Details

Date Published: 20 January 1999
PDF: 8 pages
Proc. SPIE 3688, 6th International Conference on Industrial Lasers and Laser Applications '98, (20 January 1999); doi: 10.1117/12.337535
Show Author Affiliations
Andre A. Gorbunov, Technische Univ. Dresden (Germany)
A. Tselev, Technische Univ. Dresden (Germany)
Wolfgang Pompe, Technische Univ. Dresden (Germany)


Published in SPIE Proceedings Vol. 3688:
6th International Conference on Industrial Lasers and Laser Applications '98
Vladislav Ya. Panchenko; Vladimir S. Golubev, Editor(s)

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