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Proceedings Paper

Low-cost low-power uncooled a-Si-based micro infrared camera
Author(s): Thomas R. Schimert; David D. Ratcliff; Roland W. Gooch; Bobbi Ritchey; P. McCardel; John F. Brady; K. Rachels; Steven J. Ropson; Marty Wand; M. Weinstein; John Wynn
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Paper Abstract

An amorphous silicon (a-Si) microbolometer-based uncooled infrared camera technology, offering a low- cost, low-power solution to infrared surveillance for both civilian and military application is presented. A- Si exhibits a temperature dependent resistance with a 3000K temperature coefficient of resistance (TCR) of 2.7 percent/K. The uncooled a-Si microbolometer detector structure employs a low thermal mass a-Si membrane structure with high thermal isolation legs monolithically integrated on a CMOS readout integrated circuit (ROIC) chip. A refractive resonant cavity design results in approximately 90 percent infrared absorptance over the 8-13 um spectral band. A-Si also exhibits a UV/visible photoconductive response for multispectral applications. The ROIC involves an integrating amplifier per pixel and a column multiplexed output. A 15 x 31 micro infrared camera (MIRC) has been developed, which exhibits f/l noise equivalent temperature difference, thereby significantly reducing the power requirements. The 15 x 31 camera demonstrated exhibits a 35 mm camera form factor employing a low cost f/l singlet optic and LED display, as well as low cost vacuum packaging. A larger 120 x 160 version of the MIRC is also in development and will be discussed.

Paper Details

Date Published: 7 January 1999
PDF: 10 pages
Proc. SPIE 3577, Sensors, C3I, Information, and Training Technologies for Law Enforcement, (7 January 1999); doi: 10.1117/12.336954
Show Author Affiliations
Thomas R. Schimert, Raytheon Systems Co. (United States)
David D. Ratcliff, Raytheon Systems Co. (United States)
Roland W. Gooch, Raytheon Systems Co. (United States)
Bobbi Ritchey, Raytheon Systems Co. (United States)
P. McCardel, Raytheon Systems Co. (United States)
John F. Brady, Raytheon Systems Co. (United States)
K. Rachels, Raytheon Systems Co. (United States)
Steven J. Ropson, Raytheon Systems Co. (United States)
Marty Wand, Raytheon Systems Co. (United States)
M. Weinstein, Raytheon Systems Co. (United States)
John Wynn, Raytheon Systems Co. (United States)


Published in SPIE Proceedings Vol. 3577:
Sensors, C3I, Information, and Training Technologies for Law Enforcement
Edward M. Carapezza; David B. Law, Editor(s)

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