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Proceedings Paper

Laser-induced two-dimensional submicron periodical structures on the high-reflectance surface
Author(s): Vasily V. Valyavko; Vladimir P. Osipov
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Paper Abstract

There are discovered physical aspects of one-pulse laser forming of 2D periodical surface microstructures with the characteristic sizes about 30 times less than the used laser radiation wavelength. It is experimentally shown that by means of TEA carbon dioxide laser treatment of the 800 Ao-aluminum film, evaporated on the K8-glass substrate, the periodical system of microhollows with the diameter about 0.5 micron can be formed. The proposed method may be useful for surface microstructures producing in microelectronics or precise filters fabrication.

Paper Details

Date Published: 28 December 1998
PDF: 6 pages
Proc. SPIE 3684, Laser Optics '98: Nonlinear and Coherent Optics, (28 December 1998); doi: 10.1117/12.334834
Show Author Affiliations
Vasily V. Valyavko, B.I. Stepanov Institute of Physics (Belarus)
Vladimir P. Osipov, B.I. Stepanov Institute of Physics (Belarus)

Published in SPIE Proceedings Vol. 3684:
Laser Optics '98: Nonlinear and Coherent Optics
Vladimir E. Sherstobitov, Editor(s)

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