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Proceedings Paper

Precision laser ablation of wide-band-gap materials using VUV-UV multiwavelength excitation
Author(s): Koji Sugioka; Jie Zhang; Satoshi Wada; Hideo Tashiro; Katsumi Midorikawa
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Paper Abstract

Novel ablation of wide band-gap materials such as fused quartz and GaN by multiwavelength excitation using a VUV-UV laser system is reviewed. Simultaneous irradiation of VUV and UV laser beams emitted form a VUV Raman laser presents great potential for precision from microfabrication of the materials. The mechanism and the role of VUV beams in this process are made clear on the basis of band structure. The advantages of this technique are discussed in comparison with the conventional single wavelength ablation. Furthermore, another novel ablation of glass materials using a conventional UV laser, referred to as 'laser-induced plasma assisted ablation (LIPAA)', is introduced. By LIPAA, a high quality micrograting structure is fabricated on fused quartz.

Paper Details

Date Published: 30 December 1998
PDF: 10 pages
Proc. SPIE 3683, Laser Optics '98: Superstrong Laser Fields and Applications, (30 December 1998); doi: 10.1117/12.334805
Show Author Affiliations
Koji Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
Jie Zhang, RIKEN-The Institute of Physical and Chemical Research (Japan)
Satoshi Wada, RIKEN-The Institute of Physical and Chemical Research (Japan)
Hideo Tashiro, RIKEN-The Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3683:
Laser Optics '98: Superstrong Laser Fields and Applications
Alexander A. Andreev, Editor(s)

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