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Proceedings Paper

Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits
Author(s): L. Feenstra; O. B. Hoekstra; Peter J. M. Peters; Wilhelmus J. Witteman
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Paper Abstract

An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.

Paper Details

Date Published: 22 December 1998
PDF: 7 pages
Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); doi: 10.1117/12.334503
Show Author Affiliations
L. Feenstra, Univ. of Twente (Netherlands)
O. B. Hoekstra, Univ. of Twente (Netherlands)
Peter J. M. Peters, Univ. of Twente (Netherlands)
Wilhelmus J. Witteman, Univ. of Twente (Netherlands)


Published in SPIE Proceedings Vol. 3574:
XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Anatoly S. Boreisho; Gennady A. Baranov, Editor(s)

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