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Proceedings Paper

High-average-power excimer lasers
Author(s): Vladimir M. Borisov; Andrei I. Demin; Oleg B. Khristoforov; Yurii B. Kirykhin; Aleksandr Yu. Vinokhodov; V. A. Vodchits; Dirk Basting; Uwe Stamm; Frank Voss; Igor Bragin
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Paper Abstract

A review of recent achievements and new tendencies in the development high energy, high repetition rate excimer lasers will be presented. The paper mainly focuses on the features of KrF, XeCl lasers with different combinations of output energy x pulse repetition frequency, for example: 1 J X 600 Hz (KrF); 3 J X 200 Hz or 10 J X 100 Hz (XeCl), which have been developed as candidates for industrial applications.

Paper Details

Date Published: 22 December 1998
PDF: 11 pages
Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); doi: 10.1117/12.334492
Show Author Affiliations
Vladimir M. Borisov, Troitsk Institute for Innovation and Fusion Research (Russia)
Andrei I. Demin, Troitsk Institute for Innovation and Fusion Research (Russia)
Oleg B. Khristoforov, Troitsk Institute for Innovation and Fusion Research (Russia)
Yurii B. Kirykhin, Troitsk Institute for Innovation and Fusion Research (Russia)
Aleksandr Yu. Vinokhodov, Troitsk Institute for Innovation and Fusion Research (Russia)
V. A. Vodchits, Troitsk Institute for Innovation and Fusion Research (Russia)
Dirk Basting, Lambda Physik GmbH (United States)
Uwe Stamm, Lambda Physik GmbH (Germany)
Frank Voss, Lambda Physik GmbH (Germany)
Igor Bragin, Lambda Physik GmbH (Germany)


Published in SPIE Proceedings Vol. 3574:
XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Anatoly S. Boreisho; Gennady A. Baranov, Editor(s)

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