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Proceedings Paper

Two-frequency phase-shifting projection moire topography
Author(s): Seung-Woo Kim; Jung-Taek Oh; Moon-Sik Jung; Yi-Bae Choi
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Paper Abstract

Adopting phase-shifting technique in moire topography provides many advantages in measuring complex surface profiles with varying reflectance. However, still the so- called 2(pi) -ambiguity problem remains, which limits the maximum measurable step height difference between two neighboring sample points to be less than half the equivalent wavelength of moire fringes. To cope with the problem in this investigation, a two-wavelength scheme of projection moire topography is proposed along with necessary hardware design considerations. Test results prove that the proposed scheme is capable of finding absolute fringe orders automatically, so that the 2(pi) -ambiguity problem can be effectively overcome so as to treat large step discontinuities in measured surfaces.

Paper Details

Date Published: 29 December 1998
PDF: 7 pages
Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); doi: 10.1117/12.334348
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Jung-Taek Oh, Korea Advanced Institute of Science and Technology (South Korea)
Moon-Sik Jung, Korea Advanced Institute of Science and Technology (South Korea)
Yi-Bae Choi, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3520:
Three-Dimensional Imaging, Optical Metrology, and Inspection IV
Kevin G. Harding; Donald J. Svetkoff; Katherine Creath; James S. Harris, Editor(s)

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