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Proceedings Paper

Characterization of a geometrically desensitized interferometer for flatness testing
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Paper Abstract

We describe the detailed design of a geometrically desensitized interferometer using two transmission diffraction gratings. A number of models of the instrument are used to eliminate object ghosts and stray light contributions. We then investigate analytically the influence of object slope variations on the instrument precision. We show that the part can be located at a measurement location where the metrology is optimized. Analytical and raytracing models demonstrate excellent agreement with experiment.

Paper Details

Date Published: 29 December 1998
PDF: 9 pages
Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); doi: 10.1117/12.334344
Show Author Affiliations
Xavier Colonna de Lega, Zygo Corp. (United States)
James F. Biegen, Zygo Corp. (United States)
Dave Stephenson, Zygo Corp. (United States)
Peter J. de Groot, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 3520:
Three-Dimensional Imaging, Optical Metrology, and Inspection IV
Kevin G. Harding; Donald J. Svetkoff; Katherine Creath; James S. Harris, Editor(s)

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