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Proceedings Paper

Microstructured silicon substrate for low-power multi-gas-sensor applications
Author(s): Heinz-Georg Dura; W. Mokwa; J. Werno
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Paper Abstract

Multi gas sensor systems are often the only way for increasing selectivity of a gas measurement in a given environment. It is shown that the cycled heating of sensor membranes give the possibility for quantitative analysis of gas mixtures. In addition the integration of several thermally decoupled sensor elements with different gas sensitivities on one silicon chip is possible. On the other hand for hand held devices low power consumption is necessary. In this paper we present results on a microstructured silicon substrate with different gas sensors, each placed on a thermally insulated silicon membrane, optimized for cycled heating.

Paper Details

Date Published: 18 December 1998
PDF: 7 pages
Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); doi: 10.1117/12.333740
Show Author Affiliations
Heinz-Georg Dura, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
W. Mokwa, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
J. Werno, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)


Published in SPIE Proceedings Vol. 3539:
Chemical Microsensors and Applications
Stephanus Buettgenbach, Editor(s)

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