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Proceedings Paper

Fabrication and characterization of gas-sensitive layers based on nanocrystalline materials
Author(s): Patrick Keller; Karina Zweiacker; Joerg-Uwe Meyer
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Paper Abstract

A new generation of solid state sensors based on nanocrystalline BaTiO3 films containing various semiconducting oxides has been developed. The sensors were fabricated from BaTiO3 based nanopowder mixtures using thick film technology and were characterized regarding their CO2-gas sensitivity at different operation temperatures and gas environments. It was found that the sensors operate over a wide range of CO2 concentrations. Interfering gases have only minor effects on the sensor response. By using miniaturized Al2O3-substrates as carriers for the sensitive nanocrystalline layer a significant decrease of the power and powder consumption for each sensor was achieved.

Paper Details

Date Published: 18 December 1998
PDF: 8 pages
Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); doi: 10.1117/12.333737
Show Author Affiliations
Patrick Keller, Fraunhofer Institute for Biomedical Engineering (France)
Karina Zweiacker, Fraunhofer Institute for Biomedical Engineering (Germany)
Joerg-Uwe Meyer, Fraunhofer Institute for Biomedical Engineering (Germany)


Published in SPIE Proceedings Vol. 3539:
Chemical Microsensors and Applications
Stephanus Buettgenbach, Editor(s)

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