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Proceedings Paper

High-gain wavelength dispersive spectrometer for light element x-ray microanalysis
Author(s): David B. O'Hara
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Paper Abstract

We have developed a new type of X-Ray spectrometer intended for light element micro-analysis applications. This spectrometer typically has energy resolution better than 20 eV, very high count rates for low X-Ray energies characteristic of light elements, quasi-parallel data collection similar to Energy Dispersive Spectroscopy (EDS), weighs less than 20 lb., and is mechanically very simple. Fabrication of this spectrometer is possible due to our development of X-Ray collection/collimation optics for low X- Ray energy which collect large solid angles of sub-KeV x-rays and reflect them into a parallel beam. The spectrometer is intended for electron beam microanalysis, small spot XRF and other X-Ray micro-analysis methods. In this paper, we present the theory of operation, some details of collimator fabrication, spectrometer fabrication and some preliminary test data.

Paper Details

Date Published: 17 December 1998
PDF: 9 pages
Proc. SPIE 3443, X-Ray and Ultraviolet Spectroscopy and Polarimetry II, (17 December 1998); doi: 10.1117/12.333612
Show Author Affiliations
David B. O'Hara, Parallax Research, Inc. (United States)

Published in SPIE Proceedings Vol. 3443:
X-Ray and Ultraviolet Spectroscopy and Polarimetry II
Silvano Fineschi, Editor(s)

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