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Proceedings Paper

Effect of surface roughness of substrate on grazing incidence x-ray optics
Author(s): Keisuke Tamura; Koujun Yamashita; Hideyo Kunieda; Yuzuru Tawara; Kazutoshi Haga; Norio Nakajo; Takashi Okajima; Gyanendra S. Lodha; Yoshiharu Namba; Jin Yu; Jean M. Bennett
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Paper Abstract

Grazing incidence specular reflectance and near specular scattering of uncoated and multilayer coated substrates are measured at Al-K(alpha) (1.486 keV) and Cu-K(alpha) (8.047 keV). Substrates included superpolished fused silica, SiO2 wafer, superpolished and precision ground Zerodur, float polished BK7 glass, and precision ground silicon carbide. Surface topography of these substrate had been measured with the Scanning Probe Microscope (SPM) and a Talystep mechanical profiler. The results showed that roughnesses obtained from 100 micrometer X 100 micrometer SPM images and 100 micrometer Talystep profiles were in good agreement with that calculated from the Al-K(alpha) X-ray measurements. X-ray measurements of the multilayers deposited on these substrates are very important. The results of this study can be used as a foundation of calculating the X-ray specular reflectance and diffuse scattering at grazing incidence from multilayer coated mirrors. We coated these substrates with Pt/C multilayers. Its periodical length were 40 angstrom and number of layer pairs was 40. The measured reflectivity showed no significant correlation between interfacial roughness of multilayers and the substrate surface roughness. The interfacial roughness of most samples scattered around 3 - 4 angstrom except for the precision ground silicon carbide and the precision ground Zerodur. The surface roughness of these exceptional substrates are considerably larger value of 6 angstrom and 9 angstrom rms from Talystep measurement. When the surface roughness of the substrate is small enough, typically less than 3 angstrom interfacial roughness of multilayers are considered to be independent from substrates.

Paper Details

Date Published: 11 December 1998
PDF: 10 pages
Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); doi: 10.1117/12.332518
Show Author Affiliations
Keisuke Tamura, Japan Society for the Promotion of Science for Young Scientists (Japan)
Koujun Yamashita, Nagoya Univ. (Japan)
Hideyo Kunieda, Nagoya Univ. (Japan)
Yuzuru Tawara, Nagoya Univ. (Japan)
Kazutoshi Haga, Nagoya Univ. (Japan)
Norio Nakajo, Nagoya Univ. (Japan)
Takashi Okajima, Nagoya Univ. (United States)
Gyanendra S. Lodha, Ctr. for Advanced Technology (India)
Yoshiharu Namba, Chubu Univ. (Japan)
Jin Yu, Chubu Univ. (Japan)
Jean M. Bennett, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 3448:
Crystal and Multilayer Optics
Albert T. Macrander; Andreas K. Freund; Tetsuya Ishikawa; Dennis M. Mills, Editor(s)

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